Reduced self-heating by strained silicon substrate engineering

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  2. Professor Anthony O'Neill
  3. Rouzet Agaiby
  4. Dr Sarah Olsen
  5. Yang Yang
Author(s)O'Neill AG, Agaiby R, Olsen S, Yang Y, Hellstrom P-E, Ostling M, Oehme M, Lyutovich K, Kasper E, Eneman G, Verheyen P, Loo R, Claeys C, Fiegna C, Sangiorgi E
Publication type Article
JournalApplied Surface Science
Year2008
Volume254
Issue19
Pages6182-6185
ISSN (print)0169-4332
ISSN (electronic)1873-5584
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PublisherElsevier BV
URLhttp://dx.doi.org/10.1016/j.apsusc.2008.02.172
DOI10.1016/j.apsusc.2008.02.172
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