Mode shape and failure analysis of high frequency MEMS/NEMS using Raman spectroscopy

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  2. Dr John Hedley
  3. Dr Isabel Arce-Garcia
  4. Dr Barry Gallacher
Author(s)Hedley J, Hu Z, Arce-Garcia I, Gallacher BJ
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference Name3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS
Conference LocationSanya, Hainan Island, China
Year of Conference2008
Date6-9 January 2008
Volume
Pages842-846
ISBN9781424419081
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PublisherIEEE
URLhttp://dx.doi.org/10.1109/NEMS.2008.4484455
DOI10.1109/NEMS.2008.4484455
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