The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor

  1. Lookup NU author(s)
  2. Khamin Ismail
  3. Professor James Burdess
  4. Dr Alun Harris
  5. Dr Guillaume Suarez
  6. Dr Neil Keegan
  7. Julia Spoors
  8. Dr Seung Chang
  9. Professor Calum McNeil
  10. Dr John Hedley
Author(s)Ismail AK, Burdess JS, Harris AJ, Suarez G, Keegan N, Spoors JA, Chang SC, McNeil CJ, Hedley J
Publication type Article
JournalJournal of Micromechanics and Microengineering
Year2008
Volume18
Issue2
Pages
ISSN (print)0960-1317
ISSN (electronic)0960-1317
Full text is available for this publication:
PublisherInstitute of Physics Publishing Ltd.
URLhttp://dx.doi.org/10.1088/0960-1317/18/2/025021
DOI10.1088/0960-1317/18/2/025021
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