Design, fabrication and testing of 3C-SiC sensors for high temperature applications

  1. Lookup NU author(s)
  2. Dr Michele Pozzi
  3. Dr Alun Harris
  4. Professor James Burdess
  5. Dr Gordon Phelps
  6. Professor Nick Wright
Author(s)Pozzi M, Harris AJ, Burdess JS, Argyrakis P, Lee KK, Cheung R, Phelps GJ, Wright NG
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameDevice and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV: Proceedings of SPIE, the International Society for Optical Engineering
Conference LocationCanberra, Australia
Year of Conference2007
Date5-7 December 2007
Volume6800
Pages-
0277786X
ISBN9780819469717
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PublisherSociety for Optical Engineering
URLhttp://dx.doi.org/10.1117/12.758245
DOI10.1117/12.758245
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