The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors
- Lookup NU author(s)
- Bing Miao
- Dr Rajat Mahapatra
- Professor Nick Wright
- Dr Alton Horsfall
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| Author(s) | | Miao B, Mahapatra R, Wright N, Horsfall A |
| Publication type | | Article |
| Journal | | Journal of Applied Physics |
| Year | | 2008 |
| Volume | | 104 |
| Issue | | 5 |
| Pages | | |
| ISSN (print) | | 0021-8979 |
| ISSN (electronic) | | 1520-8850 |
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| Full text for this publication is not currently held within this repository. Alternative links are provided below where available. |
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| Publisher | | American Institute of Physics |
| URL | | http://dx.doi.org/10.1063/1.2973687 |
| DOI | | 10.1063/1.2973687 |
| Notes | | Article no. 054510
8 pages |
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