The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors

  1. Lookup NU author(s)
  2. Bing Miao
  3. Dr Rajat Mahapatra
  4. Professor Nick Wright
  5. Dr Alton Horsfall
Author(s)Miao B, Mahapatra R, Wright N, Horsfall A
Publication type Article
JournalJournal of Applied Physics
Year2008
Volume104
Issue5
Pages
ISSN (print)0021-8979
ISSN (electronic)1520-8850
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.2973687
DOI10.1063/1.2973687
NotesArticle no. 054510 8 pages
Actions    Link to this publication
Share