Photoacoustic spectroscopy at the nanoscale for ultra-shallow implanted silicon

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  2. Dr Nick Bennett
  3. Professor Nick Cowern
Author(s)Horan K, Stopford J, McNally P, Bennett N, Cowern NEB
Publication type Conference Proceedings (inc. Abstract)
Conference NameInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
Conference LocationNapa, California
Year of Conference2009
Legacy Date26-29 April 2009
Sponsor(s)Imago Scientific Instruments, Capres A/S
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