Raman metrology for advanced CMOS devices - advantages and challenges

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  2. Dr Nick Bennett
  3. Professor Nick Cowern
Author(s)O'Reilly L, Horan K, McNally P, Timans P, Reyes J, Prussin S, Bennett N, Cowern N, Gelpey J, McCoy S, Lerch W, Paul S, Bolze D
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameProceedings of INSIGHT
Conference LocationNapa CA, USA
Year of Conference2009
Date26-29 April 2009
Volume
Pages
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