Strained Si/strained SiGe/relaxed SiGe structures: identifying roughness due to compressed SiGe and its impact on high mobility MOSFETs

  1. Lookup NU author(s)
  2. Dr Enrique Escobedo-Cousin
  3. Dr Sarah Olsen
  4. Professor Anthony O'Neill
  5. Layi Alatise
  6. Rouzet Agaiby
  7. Dr Piotr Dobrosz
Author(s)Escobedo-Cousin E, Olsen SH, O'Neill AG, Alatise OM, Agaiby RMB, Dobrosz P, Braithwaite G, Cuthbertson A, Grasby T, Parker EHC
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameMaterials REsearch Society Conference (MRS)
Conference LocationSan Francisco, USA
Year of Conference2007
Date9-13 April 2007
Volume
Pages
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