Material requirements and design considerations for Si/SiGe heterojunction CMOS

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  2. Stephen Badcock
  3. Professor Anthony O'Neill
Author(s)Badcock S, O'Neill A
Publication type Article
JournalSuperlattices and Microstructures
Year2000
Volume28
Issue5-6
Pages363-368
ISSN (print)0749-6036
ISSN (electronic)1096-3677
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PublisherAcademic Press
URLhttp://dx.doi.org/10.1006/spmi.2000.0935
DOI10.1006/spmi.2000.0935
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