High aspect ratio ring gyroscopes fabricated in <100> silicon on insulator (SOI) material

  1. Lookup NU author(s)
  2. Professor James Burdess
  3. Dr Alun Harris
Author(s)Harris AJ; Burdess JS; McNiew ME; Young M
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference Name10th International Conference on Solid-State Sensors and Actuators
Conference LocationSendai, Japan
Year of Conference1999
Date7-10 June 1999
Volume
Pages7-10
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.