High aspect ratio ring gyroscopes fabricated in <100> silicon on insulator (SOI) material

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  2. Professor James Burdess
  3. Dr Alun Harris
Author(s)Harris AJ; Burdess JS; McNiew ME; Young M
Publication type Conference Proceedings (inc. Abstract)
Conference Name10th International Conference on Solid-State Sensors and Actuators
Conference LocationSendai, Japan
Year of Conference1999
Legacy Date7-10 June 1999
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