Enhanced nitrogen diffusion in 4H-SiC

  1. Lookup NU author(s)
  2. Dr Gordon Phelps
  3. Professor Nick Wright
  4. Dr Graeme Chester
  5. Dr Christopher Johnson
  6. Professor Anthony O'Neill
  7. Dr Sylvie Ortolland
  8. Dr Alton Horsfall
  9. Dr Konstantin Vasilevskiy
Author(s)Wright NG; Vassilevski K; Ortolland S; Phelps GJ; O'Neill AG; Horsfall A; Chester EG; Johnson CM; Gwilliam RM; Coleman PG; Burrows CP
Publication type Article
JournalApplied Physics Letters
Year2002
Volume80
Issue2
Pages228-230
ISSN (print)0003-6951
ISSN (electronic)1077-3118
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1063/1.1432451
DOI10.1063/1.1432451
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