Fabrication of SiC microelectromechanical systems using one-step dry etching

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  2. Mr MA Hussan Hassan
  3. Dr Alun Harris
  4. Professor James Burdess
Author(s)Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M
Publication type Conference Proceedings (inc. Abstract)
Conference NameJournal of Vacuum Science and Technology B: 47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN)
Conference LocationTampa, Florida, USA
Year of Conference2003
Date27-30 May 2003
Volume21 (6)
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PublisherAmerican Institute of Physics
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