Fabrication of SiC microelectromechanical systems using one-step dry etching

  1. Lookup NU author(s)
  2. Mr MA Hussan Hassan
  3. Dr Alun Harris
  4. Professor James Burdess
Author(s)Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M
Editor(s)
Publication type Conference Proceedings (inc. Abstract)
Conference NameJournal of Vacuum Science and Technology B: 47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN)
Conference LocationTampa, Florida, USA
Year of Conference2003
Date27-30 May 2003
Volume21 (6)
Pages2998-3001
ISBN15208567
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PublisherAmerican Institute of Physics
URLhttp://dx.doi.org/10.1116/1.1627804
DOI10.1116/1.1627804
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