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X-ray diffraction study of gold nitride films: Observation of a solid solution phase

Lookup NU author(s): Luís Alves, Dr Abel Brieva, Professor Lidija Siller

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Abstract

The structure of nitride containing gold films produced by reactive ion sputtering and nitrogen plasma etching is investigated using x-ray photoelectron spectroscopy and x-ray diffraction. It is found that gold nitride is a solid solution of nitrogen atoms dissolved in a fcc gold matrix. Differences between the strain and lattice parameters of gold and gold nitride films were observed and are explained by interstitial nitrogen present in the latter. c 2008 American Institute of Physics. [DOI: 10.1063/1.3040717]


Publication metadata

Author(s): Alves L, Hase TPA, Hunt MRC, Brieva AC, Siller L

Publication type: Article

Publication status: Published

Journal: Journal of Applied Physics

Year: 2008

Volume: 104

Issue: 11

Print publication date: 01/12/2008

ISSN (print): 0021-8979

ISSN (electronic): 1089-7550

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.3040717

DOI: 10.1063/1.3040717


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