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Impact of Ge diffusion and wafer cross hatching on strained Si MOSFET electrical parameters

Lookup NU author(s): Luke Driscoll, Dr Sarah Olsen, Dr Sanatan Chattopadhyay, Professor Anthony O'Neill, Dr Kelvin Kwa, Dr Piotr Dobrosz, Professor Steve Bull

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Author(s): Driscoll L, Olsen S, Chattopadhyay S, O'Neill A, Kwa K, Dobrosz P, Bull S

Editor(s): Caymax, M., Rim, K., Zaima, S., Kasper, E., Fichtner, P.F.P.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: High-Mobility Group IV Materials and Devices

Year of Conference: 2004

Pages: 225-230

ISSN: 0272-9172

Publisher: Materials Research Society

Library holdings: Search Newcastle University Library for this item

ISBN: 9781558997592


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