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Experimental observations of surface roughness in uniaxially loaded strained Si microelectromechanical systems-based structures

Lookup NU author(s): Dr Enrique Escobedo-Cousin, Dr Sarah Olsen, Professor Jean-Pierre Raskin

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Author(s): Escobedo-Cousin E, Olsen SH, Pardoen T, Bhaskar U, Raskin JP

Publication type: Article

Publication status: Published

Journal: Applied Physics Letters

Year: 2011

Volume: 99

Issue: 24

Print publication date: 14/12/2011

Date deposited: 01/07/2013

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.3669413

DOI: 10.1063/1.3669413


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