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The application of parametric excitation to a micro-ring gyroscope

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris, Dr John Hedley

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Abstract

A parametric excitation scheme that separates the drive and response frequencies of an electrostatically driven ring gyroscope in the approximate ratio of 10:1 is reported. This frequency separation permits reduction of troublesome electrical feedthrough common in many MEMS devices.


Publication metadata

Author(s): Gallacher J, Burdess JS, Harris AJ, Hedley J

Editor(s): Laudon, M., Romanowicz, B.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Nanotechnology Conference and Trade Show (Nanotech)

Year of Conference: 2004

Pages: 359-362

Publisher: CRC Press

Library holdings: Search Newcastle University Library for this item

ISBN: 9780972842273


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