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SiC gas sensor arrays for extreme environments

Lookup NU author(s): Sandip Roy, Benjamin Furnival, Neal Wood, Dr Alton Horsfall, Dr Chris O'Malley

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Abstract

For the first time SiC-based gas sensor arrays have been demonstrated, which are capable of discriminating gas species under harsh environments. The structures utilise either a TiO2 or HfO2 dielectric layer and a Pt or Pd catalytic contact. We show that the defects in the dielectric dominate the response to hydrogen and oxygen, resulting in array behaviour, without the need for large numbers of catalytic metals. Simple multiple linear regression techniques can be used with the array to provide a real time prediction of the gas contents of a mixture.


Publication metadata

Author(s): Roy SK, Furnival BJD, Wood NG, Vassilevski KV, Wright NG, Horsfall AB, O'Malley CJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: IEEE Sensors 2013

Year of Conference: 2013

Pages: 1-4

ISSN: 1930-0395

Publisher: IEEE

URL: http://dx.doi.org/10.1109/ICSENS.2013.6688186


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