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Surface integrity characteristics in micro end milling of monocrystalline silicon

Lookup NU author(s): Dr Dehong Huo, Professor Kenneth Dalgarno

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Abstract

Experimental investigation on micro milling of single crystal silicon was performed on an ultra-precision micro machine using cBN and diamond coated tools. Raman spectroscopy studies of micro machined surfaces provided evidence of processing induced phase transformations and residual stress under a variety of machining conditions. Surface and subsurface characterisation studies show that ductile machining mode can be achieved at certain machining conditions. Silicon brain implants used in neurosurgery application were fabricated with good dimensional accuracy and surface finishes, which demonstrated that micro milling is a promising process for fabrication of micro silicon components.


Publication metadata

Author(s): Huo D, Zhao Y, Dalgarno K

Editor(s): Leach, R

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014

Year of Conference: 2014

Pages: 162-165

Acceptance date: 01/02/2014

Publisher: euspen

Library holdings: Search Newcastle University Library for this item

Sponsor(s): ASML,Carl Zeiss SMT GmbH,et al.,Heidenhain,Olympus Europa SE and Co. KG

ISBN: 9780956679031


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