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Phase Formation at Rapid Thermal Annealing of Al/Ti/Ni Ohmic Contacts on 4H-SiC

Lookup NU author(s): Dr Konstantin VasilevskiyORCiD, Irina Nikitina

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Author(s): Vassilevski K, Zekentes K, Tsagaraki K, Constantinidis G, Nikitina I

Publication type: Article

Publication status: Published

Journal: Materials Science & Engineering B

Year: 2001

Volume: 80

Issue: 1-3

Pages: 370-373

ISSN (print): 2161-6221

Publisher: David Publishing Co

URL: http://dx.doi.org/10.1016/S0921-5107(00)00597-3

DOI: 10.1016/S0921-5107(00)00597-3

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