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Boron diffusion in strained and strain-relaxed SiGe

Lookup NU author(s): Professor Nick Cowern

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Author(s): Wang CC, Sheu YM, Liu S, Duffy R, Heringa A, Cowern NEB, Griffin PB

Publication type: Article

Publication status: Published

Journal: Materials Science and Engineering B

Year: 2005

Volume: 124-125

Pages: 39-44

ISSN (print): 1873-4944

Publisher: Elsevier SA

URL: http://dx.doi.org/10.1016/j.mseb.2005.08.127

DOI: 10.1016/j.mseb.2005.08.127

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