Lookup NU author(s): Emeritus Professor James Burdess,
Dr Alun Harris,
Dr John Hedley
Full text for this publication is not currently held within this repository. Alternative links are provided below where available.
Raman microspectroscopy has been used to determine the volumetric micro-strain distribution in mechanically stressed silicon microstructures. Data are presented as strain images with a spatial resolution of around 0.8 μm. A useful correlation is demonstrated between finite-element analysis calculations of volumetric strain and Raman shift. The results demonstrate that silicon beam structures incorporating a 90° bend will experience a non-uniform stress distribution along the bend radius for small radii of curvature.
Author(s): Bowden M, Gardiner DJ, Wood D, Burdess J, Harris A, Hedley J
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd
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