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3D determination of a MOSFET gate morphology by FIB tomography

Lookup NU author(s): Dr Sarah Olsen, Professor Anthony O'Neill


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Publication metadata

Author(s): Inkson BJ, Olsen S, Norris DJ, O'Neill AG, Mobus G

Editor(s): Cullis, A.G., Midgely, P.A.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Microscopy of Semiconducting Materials Conference

Year of Conference: 2004

Pages: 611-616

Publisher: Institute of Physics

Notes: Cullis AG Midgley PA Bristol, UK. Microscopy of Semiconducting Materials Conference. Cambridge, UK. 31 March-3 April 2003.

Library holdings: Search Newcastle University Library for this item

Series Title: Institute of Physics Conference Series

ISBN: 9780750309790


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