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Frequency tuning of silicon micromechanical cantilevers by laser ablation

Lookup NU author(s): Dr Barry Gallacher, Dr John Hedley, Emeritus Professor James Burdess, Dr Alun Harris

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Abstract

A theoretical model for frequency tuning of a cantilever is presented, both stiffness and mass effects have been considered. A cantilever was ablated at its fixed and free end using a Nd:YAG laser, a tuning resolution of 1 Hz was obtained. There was some disagreement between the theoretical values of -29 Hz (fixed end), 10 Hz (free end) and an actual experimental tuning of -19 Hz (fixed end), 3.5 Hz (free end). This has been attributed to the debris present around the ablation site. Consideration of this debris shows that there is a reduction in tuning of around 30% (fixed end) and 50% (free end) in the theoretical values.


Publication metadata

Author(s): Gallacher BJ, Hedley J, Burdess JS, Harris AJ

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2003)

Year of Conference: 2003

Pages: 478-481

Publisher: Nano Science and Technology Institute

URL: http://www.nsti.org/procs/Nanotech2003v1/12/M64.04

Library holdings: Search Newcastle University Library for this item

ISBN: 0972842209


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