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Device characterization at the wafer level via optical actuation and detection

Lookup NU author(s): Dr John Hedley, Emeritus Professor James Burdess, Dr Alun Harris, Dr Barry Gallacher

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Abstract

This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.

Publication metadata

Author(s): Hedley J, Burdess JS, Harris AJ, Gallacher BJ

Editor(s): Laudon, M., Romanowicz, B.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004)

Year of Conference: 2004

Number of Volumes: 3

Pages: 394-397

Publisher: Nano Science and Technology Institute

URL: http://www.nsti.org/procs/Nanotech2004v1/8/X32.05

Library holdings: Search Newcastle University Library for this item

ISBN: 0972842276

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