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Optimization of alloy composition for high-performance strained-Si-SiGe N-channel MOSFETs

Lookup NU author(s): Dr Sarah Olsen, Professor Anthony O'Neill, Luke Driscoll, Dr Sanatan Chattopadhyay, Dr Kelvin Kwa

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Author(s): Olsen SH, O'Neill AG, Driscoll LS, Chattopadhyay S, Kwa KSK, Waite AM, Tang YT, Evans AGR, Zhang J

Publication type: Article

Publication status: Published

Journal: IEEE Transactions on Electron Devices

Year: 2004

Volume: 51

Issue: 7

Pages: 1156-1163

ISSN (print): 0018-9383

ISSN (electronic): 1557-9646

Publisher: IEEE

URL: http://dx.doi.org/10.1109/TED.2004.830656

DOI: 10.1109/TED.2004.830656


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