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Electrostatic tuning of a micro-ring gyroscope

Lookup NU author(s): Dr Barry Gallacher, Dr John Hedley, Emeritus Professor James Burdess, Dr Alun Harris

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Abstract

This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam is that it can only be employed prior to packaging. Therefore tuning to correct for environmental or structural changes during operation is not possible. However, electrostatic tuning may be implemented on-chip during operation thus enabling active tuning. Furthermore, mass trimming procedures introduce a degree of damage to the structure, which may reduce the intrinsic high quality factor desirable in the ring gyroscope.


Publication metadata

Author(s): Gallacher BJ, Hedley J, Burdess JS, Harris AJ, Rickard A, King D

Editor(s): Laudon, M., Romanowicz, B.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004)

Year of Conference: 2004

Number of Volumes: 3

Pages: 430-433

Publisher: Nano Science and Technology Institute

URL: http://www.nsti.org/procs/Nanotech2004v1/9/T56.02

Library holdings: Search Newcastle University Library for this item

ISBN: 0972842276


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