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Vibrating and resonant MEMS sensors

Lookup NU author(s): Emeritus Professor James Burdess, Dr Alun Harris, Dr Barry Gallacher, Dr John Hedley

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Abstract

This paper describes how simple mechanical elements, such as beams and plates, are used in the design of micro-vibratory sensors. The form and dynamic characteristics of these devices can be exploited to provide a variety of sensing functions, such as the measurement of mass, mass flow rate, acceleration, rate of turn, pressure and magnetic field. The importance of static and vibration testing of the sensor at the various stages manufacture is also discussed.


Publication metadata

Author(s): Burdess JS, Harris AJ, Gallacher BJ, Hedley J

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 11th World Congress in Mechanism and Machine Science

Year of Conference: 2004

Pages: 33-44

Publisher: China Machine Press

Library holdings: Search Newcastle University Library for this item

ISBN: 7111140737


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