Lookup NU author(s): Professor Peter Cumpson,
Dr John Hedley
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We have developed a compact and easy-to-use MEMS (micro electro-mechanical) calibration device for Atomic Force Microscopy, using a method that allows traceability to the SI system. The new device, which we call an Electrical Nanobalance, is calibrated by a non-contact method, a combination of electrical measurements and Doppler velocimetry. For the AFM user, the device offers a simple, accurate and traceable method for AFM cantilever spring constant calibration, for the first time. © 2004 British Crown Copyright.
Author(s): Cumpson PJ, Hedley J
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Conference on Precision Electromagnetic Measurements Digest
Year of Conference: 2004
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