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Nanometer Scale Strain Profiling Through Si-SiGe Heterolayers

Lookup NU author(s): Rouzet Agaiby, Dr Sarah Olsen, Dr Piotr Dobrosz, Professor Steve BullORCiD, Professor Anthony O'Neill

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Publication metadata

Author(s): Agaiby RMB, Olsen SH, Dobrosz P, Coulson H, Bull SJ, O'Neill AG

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 50th Electronic Materials Conference (EMC 2008)

Year of Conference: 2008

Publisher: The Minerals, Metals & Materials Society (TMS)


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