Lookup NU author(s): Dr John Hedley,
Dr Alun Harris,
Emeritus Professor James Burdess
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A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS. © 2005 IEEE.
Author(s): Enderling S, Brown III CL, Balakrishnan M, Hedley J, Stevenson JTM, Bond S, Dunare CC, Harris AJ, Burdess JS, Mitkova M, Kozicki MN, Walton AJ
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Year of Conference: 2005
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