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Application of mass transport in solid electrolyte films in tunable microelectromechanical resonators

Lookup NU author(s): Dr John Hedley

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Abstract

This paper reports on Ag-Ge-Se solid electrolyte films which can support the rapid net displacement of metal mass from a silver source to a target location within a MEMS device at low voltage and current. This displacement of mass can be used to alter material parameters and we have demonstrated a tunable MEMS resonator using this principle. In this application, the electrodeposited mass is made to form on a suspended polycrystalline silicon beam to change both its vibrating mass and stiffness, without significantly degrading the Q-factor. The paper includes some of the initial results from the resonator work and places particular emphasis on the solid state electrodeposition process and its relationship to the electrolyte composition.


Publication metadata

Author(s): Kozicki MN, Brown III CL, Mitkova M, Enderling S, Hedley J, Walton AJ

Editor(s): Laudon, M. and Romanowicz, B.

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2005)

Year of Conference: 2005

Pages: 447-450

Publisher: Nano Science and Technology Institute

URL: http://www.nsti.org/procs/Nanotech2005v3/8/M46.04

Notes: Code 66525

Library holdings: Search Newcastle University Library for this item

ISBN: 0976798522


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