Lookup NU author(s): Dr Sarah Olsen,
Professor Anthony O'Neill
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A series of SiGe/Si virtual substrate based n-channel Si MOSFETs have been analysed using transmission electron microscopy (TEM). The focal point of this work is to investigate the effect of gate oxidation upon an undulating virtual substrate surface. We find that cross-sectional TEM images of devices processed on such a wafer show a significant difference in the amplitude of gate-oxide interface roughness at the sloping edges of substrate surface. Moreover, such nanoscale roughening correlates to the variable vicinal nature of the undulating SiGe substrate surface. Methods for quantitative measurement of the roughness are presented. (9 References).
Author(s): Norris DJ, Cullis AG, Olsen SH, O'Neill AG, Zhang J
Editor(s): Cullis, A.G., Midgely, P.A.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Microscopy of Semiconducting Materials Conference
Year of Conference: 2004
Publisher: Institute of Physics Publishing
Notes: Cullis AG
Microscopy of Semiconducting Materials Conference. Cambridge, UK. 31 March-3 April 2003.
Library holdings: Search Newcastle University Library for this item
Series Title: Institute of Physics Conference Series