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The principle of a MEMS circular diaphragm mass sensor

Lookup NU author(s): Abd Ismail, Emeritus Professor James Burdess, Dr Alun Harris, Emeritus Professor Calum McNeil, Dr John Hedley, Dr Seung Chang, Dr Guillaume Suarez


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Publication metadata

Author(s): Ismail AK, Burdess JS, Harris AJ, McNeil CJ, Hedley J, Chang SC, Suarez G

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2006

Volume: 16

Issue: 8

Pages: 1487-1493

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.


DOI: 10.1088/0960-1317/16/8/008


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