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Hinge optimisation in a micro-rotating structure for stress gauging in integrated circuit interconnects

Lookup NU author(s): Sorin Soare, Dr Alton Horsfall, Professor Steve Bull, Professor Nick Wright, Dr Adrian Oila, Professor Anthony O'Neill

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Publication metadata

Author(s): Dos Santos JMM, Wang K, Soare SM, Horsfall AB, Bull SJ, Wright NG, Oila A, O'Neill AG, Terry JG, Walton AJ, Gundlacj AM, Stevenson JTM

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Research Society Symposium Proceedings

Year of Conference: 2003


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