Lookup NU author(s): Dr John Hedley
An experimental microelectromechanical system paddle resonator was made using focused ion beam fabrication from a 200 nm thick silicon nitride membrane and investigated using a laser vibrometer for resonant frequency detection. The fundamental mode was found to be torsional, as required, with a resonant frequency of 1.38 MHz and Q of 1070 at a test pressure of 20 μbar. The mass sensitivity was 55 ag Hz-1, close to the results of analytical and finite element analysis modeling, demonstrating proof of principle. © 2008 IOP Publishing Ltd.
Author(s): Boonliang B, Prewett PD, Hedley J, Preece J, Hamlett CA
Publication type: Article
Publication status: Published
Journal: Journal of Micromechanics and Microengineering
Date deposited: 28/03/2011
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd.
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