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A focused-ion-beam-fabricated micro-paddle resonator for mass detection

Lookup NU author(s): Dr John Hedley

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Abstract

An experimental microelectromechanical system paddle resonator was made using focused ion beam fabrication from a 200 nm thick silicon nitride membrane and investigated using a laser vibrometer for resonant frequency detection. The fundamental mode was found to be torsional, as required, with a resonant frequency of 1.38 MHz and Q of 1070 at a test pressure of 20 μbar. The mass sensitivity was 55 ag Hz-1, close to the results of analytical and finite element analysis modeling, demonstrating proof of principle. © 2008 IOP Publishing Ltd.


Publication metadata

Author(s): Boonliang B, Prewett PD, Hedley J, Preece J, Hamlett CA

Publication type: Article

Publication status: Published

Journal: Journal of Micromechanics and Microengineering

Year: 2008

Volume: 18

Issue: 1

Date deposited: 28/03/2011

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/18/1/015021

DOI: 10.1088/0960-1317/18/1/015021


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