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Design, fabrication and testing of 3C-SiC sensors for high temperature applications

Lookup NU author(s): Dr Michele Pozzi, Dr Alun Harris, Emeritus Professor James Burdess, Dr Gordon Phelps, Professor Nick Wright


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Publication metadata

Author(s): Pozzi M, Harris AJ, Burdess JS, Argyrakis P, Lee KK, Cheung R, Phelps GJ, Wright NG

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV: Proceedings of SPIE, the International Society for Optical Engineering

Year of Conference: 2007

Pages: -

Publisher: Society for Optical Engineering


DOI: 10.1117/12.758245

Library holdings: Search Newcastle University Library for this item

ISBN: 9780819469717


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