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Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy

Lookup NU author(s): Dr John Hedley

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Publication metadata

Author(s): Lourenco MA, Gardiner DJ, Bowden M, Hedley J, Wood D

Publication type: Article

Publication status: Published

Journal: Journal of Materials Science Letters

Year: 2000

Volume: 19

Issue: 9

Pages: 767-769

ISSN (print): 0261-8028

ISSN (electronic): 1573-4811

Publisher: Kluwer Academic Publishers

URL: http://dx.doi.org/10.1023/A:1006752321075

DOI: 10.1023/A:1006752321075

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