Lookup NU author(s): Professor Nick Wright,
Dr Konstantin Vasilevskiy,
Dr Alton Horsfall,
Dr Christopher Johnson,
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New results are presented of a surface trench defect observed during anneal of room temperature Al implants. The size of the surface defect is proportional to anneal temperature and occurs predominantly in the implanted zone. Signs of lattice strain are observed outside the implanted zone as well.
Author(s): Wright NG, Vassilevski KV, Nikitina I, Horsfall AB, Johnson CM, Bhatnagar P, Tappin P
Editor(s): Nipoti, R., Poggi, A., Scorzoni, A.
Publication type: Conference Proceedings (inc. Abstract)
Publication status: Published
Conference Name: Silicon Carbide and Related Materials: 5th European Conference on Silicon Carbide and Related Materials
Year of Conference: 2005
ISSN: 0255-5476 (print) 1422-6375 (online)
Publisher: Trans Tech Publications Ltd.
Library holdings: Search Newcastle University Library for this item
Series Title: Materials Science Forum