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Statistical modelling of the variation in advanced process technologies using a multi-level partitioned response surface approach

Lookup NU author(s): Santosh Shedabale, Dr Gordon Russell, Professor Alex Yakovlev, Dr Sanatan Chattopadhyay

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Publication metadata

Author(s): Shedabale S, Ramakrishnan H, Russell G, Yakovlev A, Chattopadhyay S

Publication type: Article

Publication status: Published

Journal: IET Circuits, Devices and Systems

Year: 2008

Volume: 2

Issue: 5

Pages: 451-464

ISSN (print): 1751-858X

ISSN (electronic): 1751-8598

Publisher: The Institution of Engineering and Technology

URL: http://dx.doi.org/10.1049/iet-cds:20080031

DOI: 10.1049/iet-cds:20080031


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