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Post Metallization Annealing Characterization of Interface Properties of High-kappa Dielectrics Stack on Silicon Carbide

Lookup NU author(s): Dr Ming-Hung Weng, Dr Rajat Mahapatra, Professor Nick Wright, Dr Alton Horsfall

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Publication metadata

Author(s): Weng MH, Mahapatra R, Wright NG, Horsfall AB

Editor(s): Suzuki, A; Okumura, H; Kimoto, T; Fuyuki, T; Fukuda, K; Nishizawa, S

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: 12th International Conference on Silicon Carbide and Related Materials (ICSCRM 2007)

Year of Conference: 2007

Pages: 771-774

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Publisher: Materials Science Forum: Trans Tech Publications Ltd

URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.600-603.771

DOI: 10.4028/www.scientific.net/MSF.600-603.771

Library holdings: Search Newcastle University Library for this item

ISBN: 9780878493579


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