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An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications

Lookup NU author(s): Dr Sunilkumar Rana, Dr Pedro Ortiz, Dr Alun Harris, Emeritus Professor James Burdess, Professor Calum McNeil

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Publication metadata

Author(s): Rana SD, Ortiz PM, Harris AJ, Burdess JS, McNeil CJ

Publication type: Article

Journal: Journal of Micromechanics and Microengineering

Year: 2009

Volume: 19

Issue: 4

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/19/4/045012

DOI: 10.1088/0960-1317/19/4/045012

Notes: Article no. 045012 11 pp.


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