Toggle Main Menu Toggle Search


The principle of a MEMS circular diaphragm mass sensor

Lookup NU author(s): Abd Ismail, Emeritus Professor James Burdess, Dr Alun Harris, Professor Calum McNeil, Dr John Hedley, Dr Seung Chang, Dr Guillaume Suarez


Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT)

Year of Conference: 2006

Pages: 69-74


Publisher: Institution of Engineering and Technology


DOI: 10.1049/ic:20060447

Library holdings: Search Newcastle University Library for this item

Series Title: IET Seminar Digest

ISBN: 0863416276


    Link to this publication