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The principle of a MEMS circular diaphragm mass sensor

Lookup NU author(s): Abd Ismail, Emeritus Professor James Burdess, Dr Alun Harris, Professor Calum McNeil, Dr John Hedley, Dr Seung Chang, Dr Guillaume Suarez

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Publication metadata

Author(s): Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT)

Year of Conference: 2006

Pages: 69-74

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Publisher: Institution of Engineering and Technology

URL: http://dx.doi.org/10.1049/ic:20060447

DOI: 10.1049/ic:20060447

Library holdings: Search Newcastle University Library for this item

Series Title: IET Seminar Digest

ISBN: 0863416276


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