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Electrical properties of thermally grown HfO2 and HfO 2/TiO2/HfO2 MIM capacitors fabricated on SiO2/Si substrate and HfO2 MIM capacitors fabricated on sapphire

Lookup NU author(s): Bing Miao, Dr Rajat Mahapatra, Dr Alton Horsfall


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Publication metadata

Author(s): Miao B, Mahapatra R, Wright N, Horsfal A

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Materials Research Society Symposium Proceedings: MRS Spring Meeting

Year of Conference: 2008

Pages: 43-48

: 02729172


Publisher: Materials Research Society

Library holdings: Search Newcastle University Library for this item

ISBN: 9781605608532


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