Toggle Main Menu Toggle Search

ePrints

Experimental observations of surface roughness in uniaxially loaded strained Si microelectromechanical systems-based structures

Lookup NU author(s): Dr Enrique Escobedo-Cousin, Dr Sarah Olsen, Professor Jean-Pierre Raskin

Downloads


Publication metadata

Author(s): Escobedo-Cousin E, Olsen SH, Pardoen T, Bhaskar U, Raskin JP

Publication type: Article

Journal: Applied Physics Letters

Year: 2011

Volume: 99

Issue: 24

Print publication date: 14/12/2011

ISSN (print): 0003-6951

ISSN (electronic): 1077-3118

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.3669413

DOI: 10.1063/1.3669413


Altmetrics

Altmetrics provided by Altmetric


Actions

    Link to this publication


Share