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On-chip tensile testing of nanoscale silicon free-standing beams

Lookup NU author(s): Dr Enrique Escobedo-Cousin, Dr Sarah Olsen, Professor Jean-Pierre Raskin

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Publication metadata

Author(s): Bhaskar U, Passi V, Houri S, Escobedo-Cousin E, Olsen SH, Pardoen T, Raskin JP

Publication type: Article

Journal: Journal of Materials Research

Year: 2012

Volume: 27

Issue: 3

Pages: 571-579

Print publication date: 01/02/2012

ISSN (print): 0884-2914

ISSN (electronic): 2044-5326

Publisher: Cambridge University Press

URL: http://dx.doi.org/10.1557/jmr.2011.340

DOI: 10.1557/jmr.2011.340


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