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Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition

Lookup NU author(s): Dr Peter King

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Publication metadata

Author(s): King PJ, Werner M, Chalker PR, Jones AC, Aspinall HC, Basca J, Wrench JS, Black K, Davies HO, Heys PN

Publication type: Article

Journal: Thin Solid Films

Year: 2011

Volume: 519

Issue: 13

Pages: 4192-4195

Print publication date: 18/02/2011

ISSN (print): 0040-6090

ISSN (electronic): 1879-2731

Publisher: Elsevier S.A.

URL: http://dx.doi.org/10.1016/j.tsf.2011.02.025

DOI: 10.1016/j.tsf.2011.02.025


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