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Issues associated with scaling up production of a lab demonstrated MEMS mass sensor

Lookup NU author(s): Dr Pedro Ortiz, Richie Burnett, Dr Neil Keegan, Jane Spoors, Dr John Hedley, Emeritus Professor James Burdess, Professor Calum McNeil

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Abstract

This work reports on the development of a lab demonstrated resonant mass sensor towards mid-size production. The issues associated with scaling-up production of the microfabricated chip are discussed with particular focus on yield and device reproducibility, as well as the constraints imposed on the design and manufacturing of the device when packaging and integration must be taken into account. Issues of modal alignment and ambient operational pressure are discussed. Fabricated devices show a 4.81 Hz pg−1 mass sensitivity with a temperature sensitivity of typically 10 Hz °C−1


Publication metadata

Author(s): Ortiz P, Burnett R, Keegan N, Spoors J, Hedley J, Harris A, Burdess J, Raphoz N, Collet J, McNeil CJ

Publication type: Article

Journal: Journal of Micromechanics and Microengineering

Year: 2012

Volume: 22

Issue: 11

Print publication date: 11/10/2012

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/22/11/115032

DOI: 10.1088/0960-1317/22/11/115032

Notes: Article no. 115032 is 12 pp.


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