Lookup NU author(s): Dr Pedro Ortiz,
Dr Neil Keegan,
Dr John Hedley,
Emeritus Professor James Burdess,
Professor Calum McNeil
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This work reports on the development of a lab demonstrated resonant mass sensor towards mid-size production. The issues associated with scaling-up production of the microfabricated chip are discussed with particular focus on yield and device reproducibility, as well as the constraints imposed on the design and manufacturing of the device when packaging and integration must be taken into account. Issues of modal alignment and ambient operational pressure are discussed. Fabricated devices show a 4.81 Hz pg−1 mass sensitivity with a temperature sensitivity of typically 10 Hz °C−1
Author(s): Ortiz P, Burnett R, Keegan N, Spoors J, Hedley J, Harris A, Burdess J, Raphoz N, Collet J, McNeil CJ
Publication type: Article
Journal: Journal of Micromechanics and Microengineering
Print publication date: 11/10/2012
ISSN (print): 0960-1317
ISSN (electronic): 1361-6439
Publisher: Institute of Physics Publishing Ltd.
Notes: Article no. 115032 is 12 pp.
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