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Evaluation of strained Si/SiGe material for high performance CMOS

Lookup NU author(s): Dr Sarah Olsen, Professor Anthony O'Neill, Dr Sanatan Chattopadhyay, Dr Kelvin Kwa, Luke Driscoll, Dr David Robbins, Dr Jun Zhang

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Publication metadata

Author(s): Olsen SH, O'Neill AG, Chattopadhyay S, Kwa KSK, Driscoll LS, Norris DJ, Cullis AG, Robbins DJ, Zhang J

Publication type: Article

Journal: Journal of Applied Physics

Year: 2004

Volume: 95

Issue: 10

Pages: 5931-5933

ISSN (print): 0021-8979

ISSN (electronic): 1089-7550

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1063/1.1691177

DOI: 10.1063/1.1691177


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