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Mechanical Properties of Polycrystalline 3C-SiC Films between Room Temperature and 600C

Lookup NU author(s): Dr Michele Pozzi, Emeritus Professor James Burdess, Dr Alun Harris, Dr Gordon Phelps, Professor Nick Wright

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Author(s): Pozzi M, Burdess JS, Harris AJ, Phelps GJ, Wright NG, Lee KK, Cheung R, Zorman CA, Mehregeny M

Editor(s): Liu, A; Wu, J; Lu, C; Reddy, CD

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: MEMS Technology and Devices: Proceedings of the ICMAT 2007 Conference

Year of Conference: 2007

Pages: 230-233

Publisher: PSP

Library holdings: Search Newcastle University Library for this item

ISBN: 9789812709608


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