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Modeling Dopant Diffusion in Strained and Strain-Relaxed Epi-SiGe

Lookup NU author(s): Dr Shibin Liu, Professor Nick Cowern

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Author(s): Sheu YM, Huang TY, Hu YP, Wang CC, Liu S, Duffy R, Heringa A, Roozeboom F, Cowern NEB, Griffin PB

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: International Conference on Simulation of Semiconductor Processes and Devices

Year of Conference: 2005

Pages: 75-78

Publisher: IEEE

URL: http://dx.doi.org/10.1109/SISPAD.2005.201476

DOI: 10.1109/SISPAD.2005.201476

Library holdings: Search Newcastle University Library for this item

ISBN: 4990276205


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